Resonant-frequency tuning of angular vertical comb-driven microscanner
Crossref DOI link: https://doi.org/10.1186/s40486-014-0004-9
Published Online: 2014-07-17
Published Print: 2014-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Eun, Youngkee
Kim, Jongbaeg
Lin, Liwei
License valid from 2014-07-17
Article History
Received: 17 March 2014
Accepted: 12 May 2014
First Online: 17 July 2014