A comprehensive review on convex and concave corners in silicon bulk micromachining based on anisotropic wet chemical etching
Crossref DOI link: https://doi.org/10.1186/S40486-015-0012-4
Published: 2015-12
Update policy: https://doi.org/10.1007/SPRINGER_CROSSMARK_POLICY
Pal, Prem
Sato, Kazuo
unspecified valid from 2015-05-27