A comprehensive review on convex and concave corners in silicon bulk micromachining based on anisotropic wet chemical etching
Crossref DOI link: https://doi.org/10.1186/s40486-015-0012-4
Published Online: 2015-05-27
Published Print: 2015-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Pal, Prem
Sato, Kazuo
License valid from 2015-05-27