Determination of precise crystallographic directions for mask alignment in wet bulk micromachining for MEMS
Crossref DOI link: https://doi.org/10.1186/s40486-016-0027-5
Published Online: 2016-06-11
Published Print: 2016-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Singh, Sajal Sagar
Pal, Prem
Pandey, Ashok Kumar
Xing, Yan
Sato, Kazuo
License valid from 2016-06-11