Realization of large-scale sub-10 nm nanogratings using a repetitive wet-chemical oxidation and etching technique
Crossref DOI link: https://doi.org/10.1186/s40486-017-0053-y
Published Online: 2017-03-24
Published Print: 2017-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Jo, Min-Seung
Choi, Kwang-Wook
Seo, Min-Ho
Yoon, Jun-Bo http://orcid.org/0000-0002-9447-3807
Funding for this research was provided by:
National Research Foundation of Korea (2011-0028781)
License valid from 2017-03-24