Temperature control of micro heater using Pt thin film temperature sensor embedded in micro gas sensor
Crossref DOI link: https://doi.org/10.1186/s40486-017-0060-z
Published Online: 2017-09-12
Published Print: 2017-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Kang, Jun-gu
Park, Joon-Shik
Park, Kwang-Bum
Shin, Junho
Lee, Eung-An
Noh, Sangsoo
Lee, Hoo-Jeong
Funding for this research was provided by:
KETI and MOTIE (10043800)
License valid from 2017-09-12