Application of scanning probe oxidation lithography in fabrication of micro-nano devices
Crossref DOI link: https://doi.org/10.1360/N032018-00159
Published Online: 2018-12-04
Published Print: 2019-03-01
Update policy: https://doi.org/10.1360/scp-crossmark-policy-page
Tian, Lixian
Yu, Xi
Lei, Shengbin
Hu, Wenping