Massively parallel computing in nano-VLSI interconnect modeling and lithography simulation
Crossref DOI link: https://doi.org/10.1360/N112016-00085
Published Online: 2016-10-25
Published Print: 2016-10-01
Update policy: https://doi.org/10.1360/scp-crossmark-policy-page
ZENG, Xuan
YAN, Changhao
ZHANG, Linbo
ZHU, Hengliang
CUI, Tao