Subwavelength Grating Structure with High Aspect Ratio and Tapered Sidewall Profiles
Crossref DOI link: https://doi.org/10.1557/adv.2015.32
Published Online: 2015-12-28
Published Print: 2016-05
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Yu, W.
Wu, D.
Duan, X.
Yi, Y.
Text and Data Mining valid from 2015-12-28
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Article History
First Online: 28 December 2015