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Pre-Patterned CVD Graphene: Insights on ALD deposition parameters and their influence on Al2O3 and graphene layers

Crossref DOI link: https://doi.org/10.1557/adv.2016.202

Published Online: 2016-03-18

Published Print: 2016-04

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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