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Laser irradiation influence on Si/3C-SiC/Si heterostructures for subsequent 3C-SiC membrane elaboration

Crossref DOI link: https://doi.org/10.1557/adv.2016.327

Published Online: 2016-05-10

Published Print: 2016-11

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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