Optimization of Ion Implantation processes for 4H-SiC DIMOSFET
Crossref DOI link: https://doi.org/10.1557/adv.2016.366
Published Online: 2016-05-18
Published Print: 2016-11
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Piluso, N.
Fontana, E.
Di Stefano, M. A.
Litrico, G.
Privitera, S.
Russo, A.
Lorenti, S.
Coffa, S.
La Via, F.
Text and Data Mining valid from 2016-05-18
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Article History
First Online: 18 May 2016