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Taguchi Design of Experiment Enabling the Reduction of Spikes on the Sides of Patterned Thin Films for Tunnel Junction Fabrication

Crossref DOI link: https://doi.org/10.1557/adv.2017.456

Published Online: 2017-06-22

Published Print: 2017-10

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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