Study of the effect of the deposition RF power on the characteristics of microcrystalline Silicon-Germanium thin films produced by PECVD
Crossref DOI link: https://doi.org/10.1557/adv.2018.645
Published Online: 2019-01-02
Published Print: 2018-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Torres, Arturo
Moreno, Mario
Rosales, Pedro
DomÃnguez, Miguel
Torres, Alfonso
Itzmoyotl, Adrian
Ambrosio, Roberto
Hidalga, Javier de la
Text and Data Mining valid from 2018-12-01
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Article History
First Online: 2 January 2019