Preparation of iridium metal films by spray chemical vapor deposition
Crossref DOI link: https://doi.org/10.1557/adv.2020.99
Published Online: 2020-09-27
Published Print: 2020-06
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Seki, Yoshiyuki
Sawada, Yutaka
Funakubo, Hiroshi
Kawano, Kazuhisa
Oshima, Noriaki
Text and Data Mining valid from 2020-06-01
Version of Record valid from 2020-06-01
Article History
First Online: 27 September 2020