A robust method for extracting the mechanical properties of thin films with rough surfaces by nanoindentation
Crossref DOI link: https://doi.org/10.1557/jmr.2016.428
Published Online: 2016-12-14
Published Print: 2016-12-14
Update policy: https://doi.org/10.1017/policypage
Fujisawa, Naoki
Zhang, Teng Fei
Lee, Byoung Hun
Kim, Kwang Ho
License valid from 2016-12-14
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License: Copyright © Materials Research Society 2016