The effect of radio frequency power on the structural and optical properties of a-C:H films prepared by PECVD
Crossref DOI link: https://doi.org/10.1557/jmr.2016.522
Published Online: 2017-01-16
Published Print: 2017-04
Update policy: https://doi.org/10.1017/policypage
Xiao, Yequan
Tan, Xinyu
Jiang, Lihua
Xiao, Ting
Xiang, Peng
Yan, Wensheng
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License: Copyright © Materials Research Society 2017