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Study of layered diamond like carbon and PECVD fluorocarbon films for ultra low dielectric constant interlayer dielectric applications

Crossref DOI link: https://doi.org/10.1557/jmr.2016.97

Published Online: 2016-03-21

Published Print: 2016-04-28

Update policy: https://doi.org/10.1017/policypage

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