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Thermodynamic study and preparation of Si–B–N ceramic coating by LPCVD from SiCl<sub>4</sub>–NH<sub>3</sub>–BCl<sub>3</sub>–H<sub>2</sub>–Ar system

Crossref DOI link: https://doi.org/10.1557/jmr.2017.323

Published Online: 2017-08-15

Published Print: 2017-10-27

Update policy: https://doi.org/10.1017/policypage

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