Competitive interplay of deposition and etching processes in atomic layer growth of cobalt and nickel metal films
Crossref DOI link: https://doi.org/10.1557/jmr.2018.379
Published Online: 2018-11-05
Published Print: 2018-12-28
Update policy: https://doi.org/10.1017/policypage
Sasinska, Alexander
Leduc, Jennifer https://orcid.org/0000-0002-5222-241X
Frank, Michael
Czympiel, Lisa
Fischer, Thomas
Christiansen, Silke H.
Mathur, Sanjay
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License: Copyright © Materials Research Society 2018