Role of oligomer structures in the surface chemistry of amidinate metal complexes used for atomic layer deposition of thin films
Crossref DOI link: https://doi.org/10.1557/jmr.2019.293
Published Online: 2019-10-07
Published Print: 2020-04-14
Update policy: https://doi.org/10.1017/policypage
Guerrero-Sánchez, Jonathan
Chen, Bo
Takeuchi, Noboru
Zaera, Francisco https://orcid.org/0000-0002-0128-7221
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License: Copyright © Materials Research Society 2019