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Laser-assisted spalling of large-area semiconductor and solid state substrates

Published Online: 2018-03-01

Published Print: 2018-03

Authors

Kaule, Felix

Swoboda, Marko

Beyer, Christian

Rieske, Ralf

Ajaj, Anas

Drescher, Wolfram D.

Schoenfelder, Stephan

Richter, Jan
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Text and Data Mining valid from 2018-03-01

Version of Record valid from 2018-03-01
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Article History

Received: 18 September 2017

Accepted: 19 December 2017

First Online: 1 March 2018

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