Emitting modification in Si-rich-SiNx films versus silicon nitride compositions
Crossref DOI link: https://doi.org/10.1557/mrc.2017.39
Published Online: 2017-06-01
Published Print: 2017-06
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Torchynska, T.
Polupan, G.
Khomenkova, L.
Slaoui, A.
Text and Data Mining valid from 2017-06-01
Version of Record valid from 2017-06-01
Article History
Received: 27 April 2017
Accepted: 31 May 2017
First Online: 1 June 2017