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The effect of substrate roughness on the properties of RF sputtered AZO thin film

Published Online: 2019-06-20

Published Print: 2019-06

Authors

Hamada, Kairi

Ogawa, Takaya

Okumura, Hideyuki

Ishihara, Keiichi N.
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Text and Data Mining valid from 2019-06-01

Version of Record valid from 2019-06-01
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Article History

Received: 24 January 2019

Accepted: 14 May 2019

First Online: 20 June 2019

Document is current