Nano Focus: Shrinkage leads to nanoscale resolution in 3D geometries and with a variety of materials
Crossref DOI link: https://doi.org/10.1557/mrs.2019.63
Published Online: 2019-03-11
Published Print: 2019-03
Update policy: https://doi.org/10.1017/policypage
Le Ferrand, Hortense
License valid from 2019-03-11
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License: Copyright © Materials Research Society 2019