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High thermal stability of doped oxide semiconductor for monolithic 3D integration

Published Online: 2022-01-11

Published Print: 2021-11

Authors

Kawai, Hiroki

Kataoka, Junji

Saito, Nobuyoshi

Ueda, Tomomasa

Ishihara, Takamitsu

Ikeda, Keiji
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Text and Data Mining valid from 2021-11-01

Version of Record valid from 2021-11-01
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Article History

Accepted: 28 October 2021

First Online: 11 January 2022

Conflict of interest

: On behalf of all authors, the corresponding author states that there is no conflict of interest.

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