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Applicability of focused Ion beam (FIB) milling with gallium, neon, and xenon to the fracture toughness characterization of gold thin films

Crossref DOI link: https://doi.org/10.1557/s43578-020-00045-w

Published Online: 2021-02-16

Published Print: 2021-06-28

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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