A review of plasma-assisted deposition methods for amorphous carbon thin and ultrathin films with a focus on the cathodic vacuum arc technique
Crossref DOI link: https://doi.org/10.1557/s43578-022-00868-9
Published Online: 2023-01-05
Published Print: 2023-02-14
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Roy, Anurag
Wang, Shengxi
Komvopoulos, Kyriakos http://orcid.org/0000-0001-9418-1567
Funding for this research was provided by:
Western Digital
Text and Data Mining valid from 2023-01-05
Version of Record valid from 2023-01-05
Article History
Received: 30 September 2022
Accepted: 2 December 2022
First Online: 5 January 2023
Declarations
:
: The authors declare no competing interests.