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Authors
Opaluch, Oliver Roman
Westrich, Sebastian
Oshnik, Nimba
Fuchs, Philipp
Fait, Jan
Wolff, Sandra
Biller, Harry
Sendel, Mandy
Becher, Christoph
Neu, Elke https://orcid.org/0000-0003-1904-3206
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Funding
Funding for this research was provided by:
Deutsche Forschungsgemeinschaft (TRR 173–268565370)
Deutsche Forschungsgemeinschaft (TRR 306-429529648)
Deutsche Forschungsgemeinschaft (INST 256/533-1 FUGG)
Rheinland-Pfälzische Technische Universität Kaiserslautern-Landau
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Article History
Received: 6 March 2025
Accepted: 27 May 2025
First Online: 13 June 2025
Declarations
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: Harry Biller and Mandy Sendel are employees of Allresist GmbH, the vendor of the Medusa 84 SiH resist used in this study. Allresist has supplied the pre-commercial prototype for these investigations free of charge. All other authors certify that they have no affiliations with or involvement in any organization or entity with any financial interest or non-financial interest in the subject matter or materials discussed in this manuscript.
