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Modified sheet resistance and specific contact resistance of Ni-, Pt- and Ti-based contacts to n-type 3C-SiC

Published Online: 2021-05-27

Published Print: 2021-08

Authors

Leech, Patrick W. http://orcid.org/0000-0003-2308-8861
Kibel, Martyn H.

Tanner, Phillip
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Text and Data Mining valid from 2021-05-27

Version of Record valid from 2021-05-27
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Article History

Received: 18 April 2021

Accepted: 18 May 2021

First Online: 27 May 2021

Declarations

:

: On behalf of all authors, the corresponding author states that there is no conflict of interest.

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