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Individual dopant profiles in high energy multiple implantation under channeling conditions

Published Online: 2022-11-08

Authors

Kawasaki, Yoji https://orcid.org/0000-0002-5945-0220
Sakaguchi, Takuya

Sano, Makoto

Sasaki, Haruka
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Text and Data Mining valid from 2022-11-08

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Article History

Received: 14 September 2022

Accepted: 27 October 2022

First Online: 8 November 2022

Declarations

:

: The authors have no relevant financial or non-financial interests to disclose.

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