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Authors
Sturm-Rogon, Leonhard https://orcid.org/0000-0002-0021-3888
Burenkov, Alexander
Cristiano, Fuccio
Eckert, Dirk
Johnsson, Anna
Neumeier, Karl
Pichler, Peter
Eisele, Ignaz
Lerch, Wilfried
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Funding
Funding for this research was provided by:
Bundesministerium für Bildung und Forschung (16FMD01K, 16FMD02, 16FMD03)
Fraunhofer-Einrichtung für Mikrosysteme und Festkörper-Technologien EMFT
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Article History
Received: 9 October 2022
Accepted: 2 November 2022
First Online: 5 December 2022
Declarations
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: This work was partially funded by the Federal Ministry of Education and Research under the project reference nos. 16FMD01K, 16FMD02 and 16FMD03.
