The diffusion analysis of implanted heavy metals in 4H-SiC
Crossref DOI link: https://doi.org/10.1557/s43580-022-00393-1
Published Online: 2022-12-15
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Wada, Ryota http://orcid.org/0000-0003-1879-2619
Hamamoto, Nariaki
Nagayama, Tsutomu
Kuroi, Takashi
Text and Data Mining valid from 2022-12-15
Version of Record valid from 2022-12-15
Article History
Received: 26 September 2022
Accepted: 3 November 2022
First Online: 15 December 2022
Declarations
:
: The authors have no relevant financial or non-financial interests to disclose.