Analysis of dopant distribution profiles of very high energy implants
Crossref DOI link: https://doi.org/10.1557/s43580-022-00397-x
Published Online: 2022-11-21
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Kondratenko, Serguei
Rubin, Leonard
Text and Data Mining valid from 2022-11-21
Version of Record valid from 2022-11-21
Article History
Received: 23 September 2022
Accepted: 2 November 2022
First Online: 21 November 2022
Declarations
:
: No funds, grants, or other support was received.