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Authors
DeLuca, J.
Cai, G.
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Article History
Received: 11 October 2022
Accepted: 16 November 2022
First Online: 5 December 2022
Declarations
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: On behalf of all authors, the corresponding author states that there is no conflict of interest.
: The ThermaWave referenced throughout this work refers to the measurement made by the KLA Thema-Probe 680XP. The Thema-Probe is standard modulated optical reflectance tool for monitoring of damage accumulated during an ion implantation process. A good reference for how Thema-Probe machines work by Pearce et al. [CitationRef removed] is referenced for further reading. A nice study of various ThermaWave sensitivities to factors such as dose and energy is also discussed by by Kamenitsa [CitationRef removed].
