Current, Michael I.
Fujibuchi, Hideto
Ido, Takahiko
Lucchesi, Greg
Article History
Received: 30 October 2022
Accepted: 6 December 2022
First Online: 28 December 2022
Declarations
:
: Ibiden manufactures HOPG graphite materinals for ion implanter lininers and other parts and provided the samples used in this work. The experiments and data anaysis were done independently.