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Thermal budget reduction for spike anneals in conventional RTP

Crossref DOI link: https://doi.org/10.1557/s43580-022-00462-5

Published Online: 2022-12-15

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Hamm, S.

Bauer, M.

Pfahler, C.

Bremensdorfer, R.

Hezler, D.

Wansidler, A.
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Text and Data Mining valid from 2022-12-15

Version of Record valid from 2022-12-15
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Article History

Received: 14 October 2022

Accepted: 21 November 2022

First Online: 15 December 2022