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Comparative evaluation of indirectly heated cathode DC ion source and inductively coupled plasma RF ion source for high current ion implanter

Published Online: 2023-01-11

Authors

Hwang, Jongjin https://orcid.org/0000-0002-0502-7152
Choi, Myoungsoo

Kim, Taehwan

Jung, Sungmook

Lee, Sunghwa

Lee, Jisoo

Hwang, K. T.

Choi, H.

Lee, Ho-Jun
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Text and Data Mining valid from 2023-01-11

Version of Record valid from 2023-01-11
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Article History

Received: 22 October 2022

Accepted: 19 December 2022

First Online: 11 January 2023

Document is current