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High-energy channeling implantation in SiC substrates with precise angle control of SS-UHE

Published Online: 2025-01-13

Published Print: 2025-02

Authors

Ono, Akichika

Sakaguchi, Takuya

Kawasaki, Yoji
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Text and Data Mining valid from 2025-01-13

Version of Record valid from 2025-01-13
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Article History

Received: 29 September 2024

Accepted: 6 January 2025

First Online: 13 January 2025

Declarations

:

: The authors have no relevant financial or non-financial interests to disclose.

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