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Comparison of arsenic and antimony dopant distribution profiles of very high energy implantations

Published Online: 2025-02-04

Published Print: 2025-02

Authors

Kondratenko, Serguei https://orcid.org/0009-0006-0462-789X
Rubin, Leonard
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Text and Data Mining valid from 2025-02-01

Version of Record valid from 2025-02-01
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Article History

Received: 21 September 2024

Accepted: 21 January 2025

First Online: 4 February 2025

Declarations

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: No funds, grants, or other support were received.

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