Adverse effect of energetic dopant cross-contamination on sheet resistance
Crossref DOI link: https://doi.org/10.1557/s43580-025-01165-3
Published Online: 2025-02-03
Published Print: 2025-02
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Handa, Shoma
Tsukahara, Kazutaka
Kawasaki, Yoji
Text and Data Mining valid from 2025-02-01
Version of Record valid from 2025-02-01
Article History
Received: 1 October 2024
Accepted: 22 January 2025
First Online: 3 February 2025
Declarations
:
: The authors have no relevant financial or non-financial interests to disclose.