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Noncontact and nondestructive measurements of electrical properties for Mg ion-implanted layers on GaN single crystals using THz time-domain spectroscopic ellipsometry

Crossref DOI link: https://doi.org/10.1557/s43580-025-01208-9

Published Online: 2025-02-24

Published Print: 2025-04

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Wang, Dingding https://orcid.org/0009-0005-4259-9167
Fujii, Takashi

Deura, Momoko

Iwamoto, Toshiyuki

Sugie, Ryuichi

Suyama, Atsushi

Kawanowa, Hitoshi

Araki, Tsutomu
Funding

Funding for this research was provided by:

Ritsumeikan University
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Article History

Received: 7 October 2024

Accepted: 13 February 2025

First Online: 24 February 2025

Declarations

:

: The authors have no competing interests to disclose.

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