Plasma and beam modeling of low-temperature plasma ion sources
Crossref DOI link: https://doi.org/10.1557/s43580-025-01230-x
Published Online: 2025-04-03
Published Print: 2025-04
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Veitzer, Seth https://orcid.org/0009-0004-3985-1555
Dehnel, Morgan
Main, Daniel
Melanson, Stéphane
Text and Data Mining valid from 2025-04-01
Version of Record valid from 2025-04-01
Article History
Received: 23 September 2024
Accepted: 3 March 2025
First Online: 3 April 2025
Declarations
:
: Conflict of interest are restricted to the authors’ institutions, Tech-X Corp., Accel-Link Ltd., and D-Pace Inc.