Fabrication of Diamond-Like Carbon Microgears in Room-Temperature Curing Nanoimprint Lithography Using Ladder-Type Hydrogen Silsesquioxane
Crossref DOI link: https://doi.org/10.1557/adv.2016.126
Published Online: 2016-02-15
Published Print: 2016-03
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Kiyohara, Shuji
Shimizu, Yuto
Ishikawa, Ippei
Harigai, Toru
Takikawa, Hirofumi
Watanabe, Masahiko
Sugiyama, Yoshinari
Omata, Yukiko
Kurashima, Yuichi
Text and Data Mining valid from 2016-02-15
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Article History
First Online: 15 February 2016