Formation of Insulating Oxide Films with Hydrolysis Reactions of Alkoxide Precursors in Supercritical Fluid CO2: Chemistry, Morphology, Characterization and Film Thickness
Crossref DOI link: https://doi.org/10.1557/adv.2016.269
Published Online: 2016-04-19
Published Print: 2016-07
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Wang, Joanna S.
Wai, Chien M.
Brown, Gail J.
Apt, Scott D.
Smith, Howard E.
Kendig, Laraba P.
Text and Data Mining valid from 2016-04-19
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First Online: 19 April 2016