Higher-k Tetragonal Phase Stabilization in Atomic Layer Deposited Hf1-xZrxO2 (0<x<1) Thin Films on Al2O3 Passivated Epitaxial-Ge
Crossref DOI link: https://doi.org/10.1557/adv.2016.65
Published Online: 2016-01-26
Published Print: 2016-01
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Dey, Sonal
Tapily, Kandabara
Consiglio, Steven
Yu, Kai-Hung
Clark, Robert D.
Wajda, Cory S.
Leusink, Gert J.
Woll, Arthur R.
Diebold, Alain C.
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Article History
First Online: 26 January 2016