Surface Smoothing Effects of Materials Used in Underlayer of MTJ with Gas Cluster Ion Beams
Crossref DOI link: https://doi.org/10.1557/adv.2016.80
Published Online: 2016-02-01
Published Print: 2016-01
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Toyoda, Noriaki
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First Online: 1 February 2016