Hot Filament CVD epitaxy of 3C-SiC on 6H and 3C-SiC substrates
Crossref DOI link: https://doi.org/10.1557/adv.2017.20
Published Online: 2017-01-12
Published Print: 2017-01
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Hens, Philip
Brow, Ryan
Robinson, Hannah
Van Zeghbroeck, Bart
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First Online: 12 January 2017