Germanium Junctions for Beyond-Si Node Using Flash Lamp Annealing (FLA)
Crossref DOI link: https://doi.org/10.1557/adv.2017.388
Published Online: 2017-05-30
Published Print: 2017-10
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Tanimura, H.
Kawarazaki, H.
Fuse, K.
Abe, M.
Ito, Y.
Aoyama, T.
Kato, S.
Kobayashi, I.
Nagayama, T.
Hamamoto, N.
Sakai, S.
Text and Data Mining valid from 2017-05-30
Version of Record valid from 2017-05-30
Article History
First Online: 30 May 2017