Angled physical vapor deposition techniques for non-conformal thin films and three-dimensional structures
Crossref DOI link: https://doi.org/10.1557/mrc.2016.3
Published Online: 2016-03-01
Published Print: 2016-03
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Wang, Zhuoxian
West, Paul R.
Meng, Xiangeng
Kinsey, Nathaniel
Shalaev, Vladimir M.
Boltasseva, Alexandra
Text and Data Mining valid from 2016-03-01
Version of Record valid from 2016-03-01
Article History
Received: 7 October 2015
Accepted: 20 January 2016
First Online: 1 March 2016