How the sputtering process influence structural, optical, and electrical properties of Zn3N2 films?
Crossref DOI link: https://doi.org/10.1557/mrc.2018.50
Published Online: 2018-06-04
Published Print: 2018-06
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Jia, Junjun
Kamijo, Hironori
Nakamura, Shin-ichi
Shigesato, Yuzo
Text and Data Mining valid from 2018-06-01
Version of Record valid from 2018-06-01
Article History
Received: 24 January 2018
Accepted: 22 March 2018
First Online: 4 June 2018